Forecasting Cost and Yield

نویسندگان

  • Pranab K. Nag
  • Wojciech Maly
  • Hermann Jacobs
چکیده

At a Glance: This article describes a prototype of a discrete event simulator-Y4 (Yield Forecaster)-capable of simulating defect related yield loss as a function of time, for a multi-product IC manufacturing line. The methodology of estimating yield and cost is based on mimicking the operation and characteristics of a manufacturing line in the time domain. The effect of particles introduced during wafer processing as well as changes in their densities due to process 2 improvements are taken into account. A spectrum of results are presented for a manufacturing scenario to demonstrate the usefulness of the simulator in formulating IC manufacturing strategies.

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تاریخ انتشار 1998